• dez
    #9
    Én az immersion lithographyra gondoltam. A kifejezés szó szerinti fordításából gondoltam, hogy itt merítés van, de most látom, hogy nincs az egész cókmók vízbe merítve: http://en.wikipedia.org/wiki/Immersion_lithography

    "As of 2007, many companies, including IBM, UMC, Toshiba, and TI are ramping for the 45 nm node using immersion lithography. AMD's Fab 36 is already equipped for using immersion lithography for its 65 nm, 45 nm and 32 nm node technologies.[6] AMD has also made preparations for advanced design for manufacturability (DFM), including layout regularity and double patterning at the 22 nm node, using immersion lithography.[7] For the 32 nm node in 2009, Intel will begin using immersion lithography as well."